Novellus Concept-1 Parts Program

Our customers are striving to continually reduce costs. We found that the largest cost to fabs was downtime, especially when a major part or assembly fails. As a result of our customer requests, we made a significant investment in equipment and staff to support our customers. Legacy equipment from some of the major OEMs are being supported on a best-effort basis by the OEM. We're filling in the gap by keeping entire tools ready to support hard-down situations.

We have the following "golden" tools powered up and fully tested in our cleanroom:

Novellus C-1

Duraflo cabinet

Sigma 6 cabinet

We continually replenish the parts on these tools as the components are sold to customers.

Novellus obsolete parts/upgrades:

Motor upgrade (plug/play retrofit for Compumotors)

Heated gate valve assembly

Power supplies

Novellus Technical Support Hotline: (M-F 7:30am-6:00pm)
(512) 203-4367 for assistance